You've quoted a 4 year old article there - and we know that IMEC is using cutting edge equipment - well in advance of "today's techniques" as per circa 2017. "Without using EUV" - Well, we know that IMEC has those machines in hand because the chipmakers do.
https://www.wired.com/story/asml-extreme-ultraviolet-lithography-chips-moores-law/
And remember, they are only making a megabit array here, not a full SOC.
Ann: Extension of Voluntary Suspension, page-93
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