Rolf,
Sony has its own fabrication division and they have funded a very significant portion of the MEMS development. There have been numerous other groups working on the MEMS chips but the final batch were received from Sony in April 2014. As to the exact terms of the Sony agreement, you would be best to call or write to the company requesting those details and any others that you may have? However, I know definitively that Sony are front and centre in the development of AKP technology.
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