Interesting note from a contact of mine over here.
On March 31, IBM announced to invest $3 billion over the next four years to establish a new Internet of Things (IoT) unit to help clients and industries to transform in the light of increasing interconnectedness and digitization." Research Lab Rueschlikon http://www.zurich.ibm.com/st/mems/cantilever.html
http://www.zurich.ibm.com/st/mems/cmos_compatible.
html http://www.zurich.ibm.com/st/mems/rf_switch.
html http://www.zurich.ibm.com/st/mems/wafer.html
Not sure how relevant they are but I helped to spread the word.
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