Was the IMEC megabit test platform min geometry 60nm possibly. Perhaps the cleanroom has other platforms available. It says on their website from 2016 that the 300mm clean room scales beyond 7nm.
https://www.imec-int.com/en/articles/imec-opens-new-cleanroom-serving-the-global-semiconductor-industry-in-its-search-towards-the-ultimate-ic-technology
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