Revasum Announces Plans to Deliver 6EZ CMP System to Senic in...

Revasum Announces Plans to Deliver 6EZ CMP System to Senic in South KoreaByHoward Rhodes JUL 28, 2023Revasum, a manufacturer of semiconductor equipment, has announced its plans to deliver the 6EZ chemical mechanical polishing (CMP) platform to Senic in the fourth quarter of 2023. This purchase will strengthen the position of 6EZ as the most flexible CMP platform available for supporting the manufacturing of silicon carbide (SiC) substrates and devices like SiC-based MOSFETs.The recent launch of the 200mm conversion kit for the 6EZ will enable the tool to support the fabrication of both 150mm and 200mm SiC substrates at Senic’s site in Cheonan, South Korea.The 6EZ CMP system was developed with Revasum’s SiC grinder, the 7AF-HMG, to eliminate subsurface damage caused by the grinding process. It ensures minimal total thickness variation (TTV) on the wafer and achieves a surface roughness (RA) of approximately 1.5 angstroms.Chris Sloan, Vice President of Global Sales and Marketing at Revasum, commented on the partnership with Senic in South Korea, stating, “This is a significant milestone for Revasum in the truly global landscape of silicon carbide substrate manufacturing. The demand for SiC devices requires international supply chains to align and support the effort, and with our advanced 6EZ CMP platform, we are thrilled to partner with Senic’s innovative team.”Mr. J.D. Seo, Vice President of Wafer Business Division at Senic, expressed his belief that the partnership would create positive synergy between the two companies. By utilizing Revasum’s 6EZ CMP system, Senic will be able to provide its customers with SiC wafers of higher surface quality. He also highlighted the proven track record of the 6EZ in SiC substrate manufacturing, making it the best option for Senic as they increase production to meet the demands of the global industry.Revasum, Inc. is focused on manufacturing equipment used in semiconductor production and currently offers grinding and CMP equipment for manufacturing SiC substrates and devices.Senic, Inc., based in Cheonan, South Korea, is an innovative silicon carbide wafer manufacturer. They supply 150mm and 200mm SiC ingots and substrates for RF and power electronics, as well as offer SiC wafer reclaim services.Post navigationThe Challenges and Controversies of Georgia Power’s Plant Vogtle Expansion By Howard RhodesRELATED POSTNEWSNUCLEARThe Challenges and Controversies of Georgia Power’s Plant Vogtle Expansion JUL 28, 2023 DANIEL HALLELECTRIC VEHICLENEWSSOLID-STATE BATTERIESSolid-State Batteries: Exploring the Material Landscape JUL 28, 2023 ANDRÉ DE BONISNEWSWINDFive Effective Strategies to Lower Your Summer Energy Bills JUL 28, 2023 TERENCE WESTSearchSearchRecent PostsRevasum Announces Plans to Deliver 6EZ CMP System to Senic in South KoreaThe Challenges and Controversies of Georgia Power’s Plant Vogtle ExpansionSolid-State Batteries: Exploring the Material LandscapeFive Effective Strategies to Lower Your Summer Energy BillsJapan to Release Treated Radioactive Water from Fukushima Plant into the SeaRecent CommentsNo comments to show.ArchivesJuly 2023June 2023April 2023March 2023CategoriesElectric VehicleEnergy MarketGreen EnergyMMRNewsNuclearOilSMRSolarSolid-State BatteriesWaterWindYOU MISSEDNEWSRevasum Announces Plans to Deliver 6EZ CMP System to Senic in South Korea JUL 28, 2023 HOWARD RHODES 0 COMMENTSNEWSNUCLEARThe Challenges and Controversies of Georgia Power’s Plant Vogtle Expansion JUL 28, 2023 DANIEL HALL 0 COMMENTSELECTRIC VEHICLENEWSSOLID-STATE BATTERIESSolid-State Batteries: Exploring the Material Landscape JUL 28, 2023 ANDRÉ DE BONIS 0 COMMENTSNEWSWINDFive Effective Strategies to Lower Your Summer Energy Bills JUL 28, 2023 TERENCE WEST 0 COMMENTSEnergyPortal.eu