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4DS - Anything but Charting, page-30554

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    PL5 is only about applying improvements (including process improvements) learned from PL4 and see if these have a positive material effect. It isn’t the goal of PL5 to scale to 20nm.
    PL5 will absolutely be sent to 4DS for testing .


    PL6 is all about scaling to 20nm. If there are physical issues with this scaling there is no point sending it to 4DS for testing because it won’t work. There will be a PL7, PL8 etc.., until they succeed.
 
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