"To overcome these GaN-based challenges, new fabrication techniques need to
be developed. One such technique is Crystal Heterogeneous Integration (CHI), a next- generation wafer bonding technology that enables the large-area integration of III-N substrates with low-optical loss as well as low-resistance at the wafer-bonded interface for the integration of n-type layers. This technique enables the realization of a new GaN-based PIC platform to integrate III-N actives and low-loss SiN-based passive waveguides."
RPCVD could be of help here.
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