Scaggs,
AVLIS not Alvis. And before that there was MLIS, MOLIS, Chemlis, Crisla, etc. Indeed billions spent, with Silex the best potential of them all. I indicated before these processes are difficult to scale, which is a well documented fact if you care to DYOR.
The two primary applications of these type of lasers today is LIS and EUV - being knee-deep into the latter, 20+ yrs in the former. Enough said.
Majority Interest, page-55
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