"It's not that the laws of physics are different at that scale so much as that different laws become far more important at smaller scales, e.g. electrostatics and air viscosity play a bigger role with a micro-membrane than with a great big cone. There is no new physics, only physics that engineers are not so used to dealing with."
I agree BobF, which is why I made no claim of new or different laws of physics. For clarity, I actually said:
"Also, Yuval and others at AKP have explained previously that the laws of physics work quite differently when dealing with the tiny dimensions involved in their MEMS device."
In other words, the observed effects are quite different at those smaller scales.
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